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- MProbe20
- 내용
MPROBE 20 Thin film measurement system (single-spot)
BASIC SPECIFICATION*:
Precision: <0.01nm or 0.01% (s.d.of 100 measurements on 200nm oxide)
Accuracy: <1nm or 0.2% (filmstack dependent)
Stability:< 0.02nm or 0.2% (daily measurements for 20 days)
Spot size:< 1mm
Sample size: >= 10mm
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